Sing-Pin Tay,: search on Z-Library

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1

[RTP 9th International Conference on Advanced Thermal Processing of Semiconductors. RTP 2001 - Anchorage, AK, USA (25-29 Sept. 2001)] 9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001 - Effect of growth and annealing conditions on interface charge of dry and wet oxides grown using rapid thermal oxidation

Sharangpani, R., Sing-Pin Tay,

Year:

2001

Language:

english

File:

PDF, 636 KB

english, 2001

2

[RTP 9th International Conference on Advanced Thermal Processing of Semiconductors. RTP 2001 - Anchorage, AK, USA (25-29 Sept. 2001)] 9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001 - The future of RTP, a technology that can change the IC fab industry

Mattson, B., Timans, P., Sing-Pin Tay,, Devine, D.J., Jung Kim,

Year:

2001

Language:

english

File:

PDF, 1.02 MB

english, 2001

3

[IEEE 10th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP 2002 - Vancouver, BC, Canada (25-27 Sept. 2002)] 10th IEEE International Conference of Advanced Thermal Processing of Semiconductors - Rapid thermal curing of low-k spin-on films

Sharangpani, R., Sing-Pin Tay,

Year:

2002

Language:

english

File:

PDF, 194 KB

english, 2002

4

[IEEE 10th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP 2002 - Vancouver, BC, Canada (25-27 Sept. 2002)] 10th IEEE International Conference of Advanced Thermal Processing of Semiconductors - Applications of rapid thermal process to nitridation of tungsten and denudation of WN/sub x/ for poly-Si/Metal gates

Yao Zhi Hu,, Sing-Pin Tay,

Year:

2002

Language:

english

File:

PDF, 319 KB

english, 2002

5

Thin gate and analog capacitor dielectrics for submicron device fabrication

Sing-Pin Tay, Joseph P. Ellul

Journal:

Journal of Electronic Materials

Year:

1992

Language:

english

File:

PDF, 1.00 MB

english, 1992

6

Characterization of high-K dielectric ZrO[sub 2] films annealed by rapid thermal processing

Hu, Yao-Zhi, Tay, Sing-Pin

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

2001

Language:

english

File:

PDF, 1.01 MB

english, 2001

7

In Situ Rapid Thermal Oxidation and Reduction of Copper Thin Films and Their Applications in Ultralarge Scale Integration

Hu, Yao Zhi, Sharangpani, Rahul, Tay, Sing-Pin

Journal:

Journal of The Electrochemical Society

Year:

2001

Language:

english

File:

PDF, 807 KB

english, 2001

8

Kinetic investigation of copper film oxidation by spectroscopic ellipsometry and reflectometry

Hu, Yao Zhi, Sharangpani, Rahul, Tay, Sing-Pin

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2000

Language:

english

File:

PDF, 567 KB

english, 2000

9

Transistor characteristics with Ta/sub 2/O/sub 5/ gate dielectric

Donggun Park,, Ya-chin King,, Qiang Lu,, Tsu-Jae King,, Chenming Hu,, Kalnitsky, A., Sing-Pin Tay,, Chia-Cheng Cheng,

Journal:

IEEE Electron Device Letters

Year:

1998

Language:

english

File:

PDF, 71 KB

english, 1998

10

Growth and Characterization of Rapid Thermal Chlorinated Oxides Grown Using In Situ Generated HCl

Sharangpani, Rahul, Tay, Sing-Pin

Journal:

Journal of The Electrochemical Society

Year:

2001

Language:

english

File:

PDF, 160 KB

english, 2001

11

Evaluation of Silicon Carbide Formed with a Single Precursor of Di-Tert-Butylsilane

Tay, Sing-Pin, Ellul, J. P., Hewitt, Susan B., Tarr, N. G., Boothroyd, A. R.

Journal:

MRS Proceedings

Year:

1992

Language:

english

File:

PDF, 209 KB

english, 1992